ERC for Wireless Integrated MicroSystems (WIMS)

Core Curriculum in Integrated Microsystems

A core set of new courses in microsystems has been completed in the Wireless Integrated MicroSystems (WIMS) ERC at the University of Michigan. Believed to be the first of its kind, the curriculum is structured around five courses developed over the past three years.

The curriculum begins with Introduction to MEMS, which takes students into the multi-disciplinary world of microsystems. The course covers microfabrication, micromachining, electro-mechanical microstructures, process integration, and applications. The course Integrated Microsystems Laboratory then allows a number of interdisciplinary student teams to define, design, fabricate, and test microsystems formed using a silicon-on-glass MEMS chip and an MOS circuit chip.

Advanced MEMS Devices & Technologies then guides the students through MEMS technologies, transducer mechanisms, microfabricated sensors and actuators, and microfluidic systems, while Advanced Integrated Microsystems discusses interface circuits, system partitioning, power issues, noise limits, system integration, testing, and packaging. The Societal Impact of Microsystems course explores the many roles that microsystems will play in solving key problems society will confront during the next fifty years.

Enrollment in Introduction to MEMS at University of Michigan increased from 83 students in 2001 to 146 in 2003 and the course is now offered at Howard University, the University of Puerto Rico, Mayaguez, Western Michigan University, Michigan State, Michigan Tech, Kyoto University, and the University of Freiburg. Enrollment in the Integrated Microsystems Laboratory increased from 13 in 2001 to 42 in 2004.

To learn more about this topic:
Visit the ERC for Wireless Integrated MicroSystems web site at http://www.wimserc.org/education/education_university.php.

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Last modified: February 22, 2005